Zero and one-dimensional electrical characterization of nanometer-wide Si fins

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Authors
Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Franquet, Alexis; Spampinato, Valentina; Petersen, Dirch; Hansen, Ole; Henrichsen, Henrik; Nielsen, Peter; Shiv, Lior; Vandervorst, Wilfried
Conference
22nd International Conference on Ion Implantation Technology - IIT
Title
Zero and one-dimensional electrical characterization of nanometer-wide Si fins
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Meeting abstract
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