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Zero and one-dimensional electrical characterization of nanometer-wide Si fins

Date

2018
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dc.contributor.authorFolkersma, Steven
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorPetersen, Dirch
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik
dc.contributor.authorNielsen, Peter
dc.contributor.authorShiv, Lior
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.date.accessioned2021-10-25T18:44:04Z
dc.date.available2021-10-25T18:44:04Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30721
dc.identifier.urlhttps://www.iit2018.org/content/dam/iisb/iit2018/documents/2018-08-06-program-iit-2018.pdf
dc.source.conference22nd International Conference on Ion Implantation Technology - IIT
dc.source.conferencedate16/09/2018
dc.source.conferencelocationWurzburg Germany
dc.title

Zero and one-dimensional electrical characterization of nanometer-wide Si fins

dc.typeMeeting abstract
dspace.entity.typePublication
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