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Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials

dc.contributor.authorFujikawa, Makoto
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorChanson, Romain
dc.contributor.authorBabaei Gavan, Khashayar
dc.contributor.authorRezvanov, Askar
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorTokei, Zsolt
dc.contributor.authorYamaguchi, T.
dc.contributor.authorNozawa, N.
dc.contributor.authorSato, Nagisa
dc.date.accessioned2021-10-25T18:48:35Z
dc.date.available2021-10-25T18:48:35Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30733
dc.sourceIIOimport
dc.titleGas phase pore stuffing for the protection of organo-silicate glass dielectric materials
dc.typeProceedings paper
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorBabaei Gavan, Khashayar
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage3
dc.source.conference2018 International Symposium on Semiconductor Manufacturing - ISSM
dc.source.conferencedate10/12/2018
dc.source.conferencelocationTokyo Japan
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8651158
imec.availabilityPublished - open access


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