Show simple item record

CNTs in the context of EUV pellicle history

dc.contributor.authorGallagher, Emily
dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorLee, Jae Uk
dc.contributor.authorMariano Juste, Marina
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorScholze, Frank
dc.contributor.authorLaubis, Christian
dc.date.accessioned2021-10-25T18:49:38Z
dc.date.available2021-10-25T18:49:38Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30736
dc.sourceIIOimport
dc.titleCNTs in the context of EUV pellicle history
dc.typeProceedings paper
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage105831E
dc.source.conferenceSPIE Advanced Lithogarphy
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2297710
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10583


Files in this item

Thumbnail
Name:
37026.pdf
Size:
612.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record