dc.contributor.author | Gallagher, Emily | |
dc.contributor.author | Timmermans, Marina | |
dc.contributor.author | Pollentier, Ivan | |
dc.contributor.author | Lee, Jae Uk | |
dc.contributor.author | Mariano Juste, Marina | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Huyghebaert, Cedric | |
dc.contributor.author | Scholze, Frank | |
dc.contributor.author | Laubis, Christian | |
dc.date.accessioned | 2021-10-25T18:49:38Z | |
dc.date.available | 2021-10-25T18:49:38Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30736 | |
dc.source | IIOimport | |
dc.title | CNTs in the context of EUV pellicle history | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Gallagher, Emily | |
dc.contributor.imecauthor | Timmermans, Marina | |
dc.contributor.imecauthor | Pollentier, Ivan | |
dc.contributor.imecauthor | Lee, Jae Uk | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Huyghebaert, Cedric | |
dc.contributor.orcidimec | Gallagher, Emily::0000-0002-2927-8298 | |
dc.contributor.orcidimec | Timmermans, Marina::0000-0001-9805-8259 | |
dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
dc.contributor.orcidimec | Lee, Jae Uk::0000-0002-9434-5055 | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 105831E | |
dc.source.conference | SPIE Advanced Lithogarphy | |
dc.source.conferencedate | 25/02/2018 | |
dc.source.conferencelocation | San Jose, CA USA | |
dc.identifier.url | https://doi.org/10.1117/12.2297710 | |
imec.availability | Published - open access | |
imec.internalnotes | Proceedings of SPIE; Vol. 10583 | |