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Simulation and characterization of a high-sensitive micro-opto-mechanical microphone

dc.contributor.authorGao, Hang
dc.contributor.authorHuang, Chih Hsien
dc.contributor.authorWesterveld, Wouter
dc.contributor.authorHaouari, Rachid
dc.contributor.authorTroia, Benedetto
dc.contributor.authorVerhaegen, Fabian
dc.contributor.authorJansen, Roelof
dc.contributor.authorFigeys, Bruno
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-25T18:50:42Z
dc.date.available2021-10-25T18:50:42Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30739
dc.sourceIIOimport
dc.titleSimulation and characterization of a high-sensitive micro-opto-mechanical microphone
dc.typeProceedings paper
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.source.peerreviewyes
dc.source.conference19th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics & Microsysystems - EuroSimE
dc.source.conferencedate15/04/2018
dc.source.conferencelocationToulouse France
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8369932/
imec.availabilityPublished - imec


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