Authors

Gao, Hang; Huang, Chih Hsien; Westerveld, Wouter; Haouari, Rachid; Troia, Benedetto; Verhaegen, Fabian; Jansen, Roelof; Figeys, Bruno; Rottenberg, Xavier; Rochus, Veronique

Conference

19th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics & Microsysystems - EuroSimE

Title

Simulation and characterization of a high-sensitive micro-opto-mechanical microphone

Publication type

Proceedings paper