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Increased WS2 crystal grain size by controlling the nucleation behavior during plasma enhanced atomic layer deposition

dc.contributor.authorGroven, Benjamin
dc.contributor.authorNalin Mehta, Ankit
dc.contributor.authorBender, Hugo
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorNuytten, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorRadu, Iuliana
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-25T19:16:39Z
dc.date.available2021-10-25T19:16:39Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30808
dc.sourceIIOimport
dc.titleIncreased WS2 crystal grain size by controlling the nucleation behavior during plasma enhanced atomic layer deposition
dc.typeMeeting abstract
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorNalin Mehta, Ankit
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecNalin Mehta, Ankit::0000-0002-2169-940X
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.source.peerreviewyes
dc.source.beginpageNS+ALE-TuA15
dc.source.conference18th International Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate29/07/2018
dc.source.conferencelocationIncheon South-Korea
dc.identifier.urlhttps://ald2018.avs.org/wp-content/uploads/2018/07/ALD-ALE-2018-Schedule.pdf
imec.availabilityPublished - imec


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