Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Conard, Thierry; Smets, Quentin; Schram, Tom; Schoenaers, Ben; Stesmans, Andre; Afanasiev, Valeri; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies

doi:10.1021/acs.chemmater.8b02924

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Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

Date

2018

Journal article

https://doi.org/10.1021/acs.chemmater.8b02924

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Vandervorst, Wilfried

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Chemistry of Materials

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Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

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