Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Conard, Thierry; Smets, Quentin; Schram, Tom; Schoenaers, Ben; Stesmans, Andre; Afanasiev, Valeri; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies

doi:10.1021/acs.chemmater.8b02924

Publication:

Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

Date

2018

Journal article

https://doi.org/10.1021/acs.chemmater.8b02924

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

;

;

;

;

;

Vandervorst, Wilfried

;

;

;

;

Journal

Chemistry of Materials

Metrics

1916 since deposited on 2021-10-25

Acq. date: 2026-01-07

Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

Date

Author(s)

Journal

Abstract

Description

Metrics

Views

Citations

Metrics

Views

Citations