Authors

Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Conard, Thierry; Smets, Quentin; Schram, Tom; Schoenaers, Ben; Stesmans, Andre; Afanasiev, Valeri; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies

DOI

10.1021/acs.chemmater.8b02924

ISSN

0897-4756

Issue

21

Journal

Chemistry of Materials

Volume

30

Title

Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

Publication type

Journal article