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One- and two-dimensional dopant/carrier profiling for ULSI

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.contributor.authorJanssens, Tom
dc.date.accessioned2021-10-01T09:29:59Z
dc.date.available2021-10-01T09:29:59Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3091
dc.sourceIIOimport
dc.titleOne- and two-dimensional dopant/carrier profiling for ULSI
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage617
dc.source.endpage640
dc.source.conferenceCharacterization and Metrology for ULSI Technology: 1998 International Conference
dc.source.conferencedate23/03/1998
dc.source.conferencelocationGaithersburg, MD USA
imec.availabilityPublished - open access
imec.internalnotesAIP Conference Proceedings; Vol. 449


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