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One- and two-dimensional dopant/carrier profiling for ULSI
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Authors
Vandervorst, Wilfried
;
Clarysse, Trudo
;
De Wolf, Peter
;
Trenkler, Thomas
;
Hantschel, Thomas
;
Stephenson, Robert
;
Janssens, Tom
Conference
Characterization and Metrology for ULSI Technology: 1998 International Conference
Title
One- and two-dimensional dopant/carrier profiling for ULSI
Publication type
Proceedings paper
Embargo date
9999-12-31
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