Publication:

One- and two-dimensional dopant/carrier profiling for ULSI

Date

1998
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.contributor.authorJanssens, Tom
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-01T09:29:59Z
dc.date.available2021-10-01T09:29:59Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3091
dc.source.beginpage617
dc.source.conferenceCharacterization and Metrology for ULSI Technology: 1998 International Conference
dc.source.conferencedate23/03/1998
dc.source.conferencelocationGaithersburg, MD USA
dc.source.endpage640
dc.title

One- and two-dimensional dopant/carrier profiling for ULSI

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
2923.pdf
Size:
2.44 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions