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One- and two-dimensional dopant/carrier profiling for ULSI
Publication:
One- and two-dimensional dopant/carrier profiling for ULSI
Date
1998
Proceedings Paper
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2923.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Clarysse, Trudo
;
De Wolf, Peter
;
Trenkler, Thomas
;
Hantschel, Thomas
;
Stephenson, Robert
;
Janssens, Tom
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1996
since deposited on 2021-10-01
2
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1996
since deposited on 2021-10-01
2
last month
Acq. date: 2025-12-08
Citations