Publication:

One- and two-dimensional dopant/carrier profiling for ULSI

Date

1998

Proceedings Paper

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Files

2923.pdf 2.44 MB

Author(s)

Vandervorst, Wilfried

;

Clarysse, Trudo

;

;

Trenkler, Thomas

;

Hantschel, Thomas

;

Stephenson, Robert

;

Statistics

1999 since deposited on 2021-10-01

1last month

Acq. date: 2026-04-27