Authors

Jacobs, Kristof J.P.; De Vos, Joeri; Stucchi, Michele; De Wolf, Ingrid; Beyne, Eric

Conference

38th Annual Nano Testing Symposium - NANOTS2018

Title

Open defect localization in 1x5 $lm 3-D TSV structures by Light-Induced Capacitance Alteration (LICA)

Publication type

Proceedings paper