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Open defect localization in 1x5 $lm 3-D TSV structures by Light-Induced Capacitance Alteration (LICA)

dc.contributor.authorJacobs, Kristof J.P.
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorStucchi, Michele
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-25T20:13:07Z
dc.date.available2021-10-25T20:13:07Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30945
dc.sourceIIOimport
dc.titleOpen defect localization in 1x5 $lm 3-D TSV structures by Light-Induced Capacitance Alteration (LICA)
dc.typeProceedings paper
dc.contributor.imecauthorJacobs, Kristof J.P.
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecJacobs, Kristof J.P.::0000-0002-1081-3633
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage6
dc.source.conference38th Annual Nano Testing Symposium - NANOTS2018
dc.source.conferencedate19/11/2018
dc.source.conferencelocationTokyo Japan
dc.identifier.urlhttp://www-nanots.ist.osaka-u.ac.jp/en/?plugin=attach&refer=%E3%83%80%E3%82%A6%E3%83%B3%E3%83%AD%E3%83%BC%E3%83%89&openfile=NANOTS2018-programE.pdf
imec.availabilityPublished - imec


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