Authors

Jacobs, Kristof J.P.; Stucchi, Michele; Afanasiev, Valeri; Gonzalez, Mario; Croes, Kristof; De Wolf, Ingrid; Beyne, Eric

ISSN

0003-6951

Issue

7

Journal

Applied Physics Letters

Volume

112

Title

Defect localization of metal interconnection lines in 3-dimensional through-silicon-via structures by differential scanning photocapacitance microscopy

Publication type

Journal article