Device challenges for logic scaling for sub-5 nm node

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Authors
Jang, Doyoung; Garcia Bardon, Marie; Yakimets, Dmitry; Schuddinck, Pieter; Ragnarsson, Lars-Ake; Sharan, Neha; Parvais, Bertrand; Spessot, Alessio; Verkest, Diederik; Mocuta, Anda
Conference
ISTDM/ICSI 2018
Title
Device challenges for logic scaling for sub-5 nm node
Publication type
Meeting abstract
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