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Device challenges for logic scaling for sub-5 nm node

dc.contributor.authorJang, Doyoung
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorSharan, Neha
dc.contributor.authorParvais, Bertrand
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMocuta, Anda
dc.date.accessioned2021-10-25T20:17:13Z
dc.date.available2021-10-25T20:17:13Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30954
dc.sourceIIOimport
dc.titleDevice challenges for logic scaling for sub-5 nm node
dc.typeMeeting abstract
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSharan, Neha
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.conferenceISTDM/ICSI 2018
dc.source.conferencedate27/05/2018
dc.source.conferencelocationPotsdam Germany
imec.availabilityPublished - imec


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