Publication:
Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing
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1862 since deposited on 2021-10-25
3last month
Acq. date: 2026-08-07
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Statistics
Views
1862 since deposited on 2021-10-25
3last month
Acq. date: 2026-08-07
Citations