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Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing

dc.contributor.authorKocaay, Deniz
dc.contributor.authorRoussel, Philippe
dc.contributor.authorCroes, Kristof
dc.contributor.authorCiofi, Ivan
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-25T21:06:33Z
dc.date.available2021-10-25T21:06:33Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31065
dc.sourceIIOimport
dc.titleMethod to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing
dc.typeProceedings paper
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpageP-GD.10-1
dc.source.endpageP-GD.10-4
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate11/03/2018
dc.source.conferencelocationBurlingame, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8353670/
imec.availabilityPublished - imec


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