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Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography

dc.contributor.authorKundu, Paromita
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2021-10-25T21:21:07Z
dc.date.available2021-10-25T21:21:07Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31096
dc.sourceIIOimport
dc.titleAdvanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography
dc.typeProceedings paper
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.conference19th International Microscopy Congress - IMC19
dc.source.conferencedate9/09/2018
dc.source.conferencelocationSydney Australia
dc.identifier.urlhttp://imc19.com/cms/wp-content/uploads/IMC19-Oral-Program-06092018-1.pdf
imec.availabilityPublished - imec


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