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BEOL pre-metallization wet clean: post-etch residue removal and metal compatibility

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorAkanishi, Yuya
dc.contributor.authorIwasaki, Akihisa
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-25T21:39:52Z
dc.date.available2021-10-25T21:39:52Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31135
dc.sourceIIOimport
dc.titleBEOL pre-metallization wet clean: post-etch residue removal and metal compatibility
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorAkanishi, Yuya
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceSurface Preparation and Cleaning Conference - SPCC
dc.source.conferencedate9/04/2018
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access


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