Epitaxial growth schemes for Fin and Gate-All-Around devices

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Authors
Loo, Roger; Hikavyy, Andriy; Rosseel, Erik; Porret, Clément; Vohra, Anurag; Kohen, David; Margetis, Joe; Tolle, John; Langer, Robert
Conference
1st Joint ISTDM / ICSI 2018 Conference
Title
Epitaxial growth schemes for Fin and Gate-All-Around devices
Publication type
Meeting abstract
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