Epitaxial GeSn: Impact of process conditions on material quality

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Authors

Loo, Roger; Shimura, Yosuke; Ike, Shinichi; Vohra, Anurag; Stoica, Toma; Stange, Daniela; Buca, Dan; Kohen, David; Margetis, Joe; Tolle, John

ISSN

0268-1242

Issue

11

Journal

Semiconductor Science and Technology

Volume

33

Title

Epitaxial GeSn: Impact of process conditions on material quality

Publication type

Journal article

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