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Dry cleaning and doping of MX2 for contact engineering

dc.contributor.authorMarinov, Daniil
dc.contributor.authorLudwig, Jonathan
dc.contributor.authorChiappe, Daniele
dc.contributor.authorVoronina, Ekaterina
dc.contributor.authorRakhimova, Tatyana
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-25T23:00:39Z
dc.date.available2021-10-25T23:00:39Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31292
dc.sourceIIOimport
dc.titleDry cleaning and doping of MX2 for contact engineering
dc.typeMeeting abstract
dc.contributor.imecauthorLudwig, Jonathan
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceAVS 65th International Symposium & Exhibition
dc.source.conferencedate21/10/2018
dc.source.conferencelocationLong Beach, CA USA
dc.identifier.urlhttps://www2.avs.org/symposium2018/ProgramBooks/ProgramBook_Session_2D+AM+EM+NS-WeM.pdf
imec.availabilityPublished - open access


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