Authors

Melkonyan, Davit; Fleischmann, Claudia; Veloso, Anabela; Franquet, Alexis; Bogdanowicz, Janusz; Morris, Richard; Vandervorst, Wilfried

ISSN

0304-3991

Journal

Ultramicroscopy

Volume

186

Title

Wet-chemical etching of atom probe tips for artefact free analyses of nanoscaled semiconductor structures

Publication type

Journal article