A wafer-scaled III-V vertical FET fabrication by means of plasma etching

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Authors
Milenin, Alexey; Veloso, Anabela; Collaert, Nadine; Piumi, Daniele
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
192
Title
A wafer-scaled III-V vertical FET fabrication by means of plasma etching
Publication type
Journal article
Embargo date
9999-12-31
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