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Influence of UV light on PECVD silicon nitride waveguide propagation loss

dc.contributor.authorNeutens, Pieter
dc.contributor.authorRutowska, Monika
dc.contributor.authorVan Roy, Wim
dc.contributor.authorJansen, Roelof
dc.contributor.authorBuja, Federico
dc.contributor.authorVan Dorpe, Pol
dc.date.accessioned2021-10-26T00:05:24Z
dc.date.available2021-10-26T00:05:24Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31411
dc.sourceIIOimport
dc.titleInfluence of UV light on PECVD silicon nitride waveguide propagation loss
dc.typeProceedings paper
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorVan Roy, Wim
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.orcidimecVan Roy, Wim::0000-0003-3232-1987
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage121
dc.source.endpage121
dc.source.conference2018 IEEE 15th International Conference on Group IV Photonics - GFP
dc.source.conferencedate29/08/2018
dc.source.conferencelocationCancun Mexico
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8478749
imec.availabilityPublished - open access


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