Show simple item record

Study of cobalt etch control by pH and oxidizer

dc.contributor.authorOgawa, Yuichi
dc.contributor.authorGan, Nobuko
dc.contributor.authorMasaoka, Toru
dc.contributor.authorYoshimura, Minami
dc.contributor.authorIino, Hideaki
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorAkanishi, Yuya
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-26T00:22:13Z
dc.date.available2021-10-26T00:22:13Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31442
dc.sourceIIOimport
dc.titleStudy of cobalt etch control by pH and oxidizer
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorAkanishi, Yuya
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.source.peerreviewyes
dc.source.conferenceSurface Preparation and Cleaning Conference - SPCC
dc.source.conferencedate9/04/2018
dc.source.conferencelocationBoston, MA USA
dc.identifier.urlhttps://linxconferences.com/spcc-2018-technical-program/
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record