Publication:
Stress induced densification of thin porous low-k films during nanoindentation
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1941 since deposited on 2021-10-26
3last month
1last week
Acq. date: 2026-02-25
Citations
Statistics
Views
1941 since deposited on 2021-10-26
3last month
1last week
Acq. date: 2026-02-25
Citations