RMG wet process challenges and the patterning knobs towards N5 and beyond logic devices

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Authors
Oniki, Yusuke; Ragnarsson, Lars-Ake; Vereecke, Guy; Sebaai, Farid; Dekkers, Harold; Dentoni Litta, Eugenio; Schram, Tom; Holsteyns, Frank; Horiguchi, Naoto
Conference
Surface Preparation and Cleaning Conference - SPCC
Title
RMG wet process challenges and the patterning knobs towards N5 and beyond logic devices
Publication type
Meeting abstract
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