dc.contributor.author | Oniki, Yusuke | |
dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2021-10-26T00:25:09Z | |
dc.date.available | 2021-10-26T00:25:09Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31447 | |
dc.source | IIOimport | |
dc.title | RMG patterning by digital wet etching of polycrystalline metal films | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Oniki, Yusuke | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 132 | |
dc.source.endpage | 140 | |
dc.source.conference | Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS | |
dc.source.conferencedate | 2/09/2018 | |
dc.source.conferencelocation | Leuven belgium | |
dc.identifier.url | https://www.scientific.net/SSP.282.132 | |
imec.availability | Published - imec | |
imec.internalnotes | Solid State Phenomena; Vol. 282 | |