Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation

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Authors
Pacco, Antoine; Holsteyns, Frank; Schaekers, Marc; Everaert, Jean-Luc; Dictus, Dries; Cuypers, Daniel
Conference
The Surface Preparation and Cleaning Conference - SPCC
Title
Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
Publication type
Proceedings paper
Embargo date
9999-12-31
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