dc.contributor.author | Philipsen, Harold | |
dc.contributor.author | Teck, Sander | |
dc.contributor.author | Mouwen, Nils | |
dc.contributor.author | Monnens, Wouter | |
dc.contributor.author | Le, Quoc Toan | |
dc.date.accessioned | 2021-10-26T01:11:27Z | |
dc.date.available | 2021-10-26T01:11:27Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31526 | |
dc.source | IIOimport | |
dc.title | Wet-chemical etching of ruthenium in acidic Ce4+ solution | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Philipsen, Harold | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.orcidimec | Philipsen, Harold::0000-0002-5029-1104 | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 284 | |
dc.source.endpage | 287 | |
dc.source.conference | Ultra Clean Processing of Semiconductor Surafces XIV - UCPSS | |
dc.source.conferencedate | 2/09/2018 | |
dc.source.conferencelocation | Leuven Belgium | |
dc.identifier.url | http://www.dx.doi.org/10.4028/www.scientific.net/SSP.282.284 | |
imec.availability | Published - imec | |
imec.internalnotes | Solid State Phenomena; Vol. 282 | |