Publication:

Novel EUV mask absorber evaluation in support of next-generation EUV imaging

Date

2018

Proceedings Paper

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Files

40687.pdf 3.98 MB

Author(s)

Philipsen, Vicky

;

;

;

Detavernier, Christophe

;

Hendrickx, Eric

;

Erdmann, Andreas

;

Evanschitzky, Peter

;

van de Kruijs, Robbert

;

Heidarnia-Fathabad, Zahra

;

;

Laubis, Christian

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Acq. date: 2026-08-06