Publication:

Novel EUV mask absorber evaluation in support of next-generation EUV imaging

Date

2018

Proceedings Paper

Simple item page Full metadata Statistics

Files

40687.pdf 3.98 MB

Author(s)

Philipsen, Vicky

;

;

;

Detavernier, Christophe

;

Hendrickx, Eric

;

Erdmann, Andreas

;

Evanschitzky, Peter

;

van de Kruijs, Robbert

;

Heidarnia-Fathabad, Zahra

;

;

Laubis, Christian

Metrics

2053 since deposited on 2021-10-26

Acq. date: 2025-12-10