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Very low temperature epitaxy of group-IV semiconductors for use in finFET, stacked nanowires and monolithic 3D integration
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1964 since deposited on 2021-10-26
2last month
Acq. date: 2026-08-06
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Statistics
Views
1964 since deposited on 2021-10-26
2last month
Acq. date: 2026-08-06
Citations