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Very low temperature epitaxy of group-IV semiconductors for use in finFET, stacked nanowires and monolithic 3D integration
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1965 since deposited on 2021-10-26
3last month
1last week
Acq. date: 2026-08-29
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Statistics
Views
1965 since deposited on 2021-10-26
3last month
1last week
Acq. date: 2026-08-29
Citations