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Very low temperature epitaxy of group-IV semiconductors for use in finFET, stacked nanowires and monolithic 3D integration

dc.contributor.authorPorret, Clément
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorGomez Granados, Juan Fernando
dc.contributor.authorBaudot, Sylvain
dc.contributor.authorVohra, Anurag
dc.contributor.authorKunert, Bernardette
dc.contributor.authorDouhard, Bastien
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchaekers, Marc
dc.contributor.authorKohen, David
dc.contributor.authorMargetis, Joe
dc.contributor.authorTolle, John
dc.contributor.authorPetersen Lima, Lucas
dc.contributor.authorSammak, Amir
dc.contributor.authorScappucci, Giordano
dc.contributor.authorRosseel, Erik
dc.contributor.authorLanger, Robert
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-26T01:28:17Z
dc.date.available2021-10-26T01:28:17Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31554
dc.sourceIIOimport
dc.titleVery low temperature epitaxy of group-IV semiconductors for use in finFET, stacked nanowires and monolithic 3D integration
dc.typeMeeting abstract
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorGomez Granados, Juan Fernando
dc.contributor.imecauthorBaudot, Sylvain
dc.contributor.imecauthorVohra, Anurag
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecVohra, Anurag::0000-0002-2831-0719
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage1050
dc.source.conferenceECS Fall Meeting, SiGe & Ge Symposium
dc.source.conferencedate30/09/2018
dc.source.conferencelocationCancun Mexico
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2018-02/31/1050.abstract
imec.availabilityPublished - imec


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