Authors

Ronse, Kurt; Pforr, Rainer; Baik, Ki-Ho; Jonckheere, Rik; Van den hove, Luc

Journal

Microelectronic Engineering

Volume

23

Title

Attenuated phase shifting masks in combination with off-axis illumination: A way towards quarter micron DUV lithography for random logic operations

Publication type

Journal article

Embargo date

9999-12-31