Authors

Wu, Ming Fang; Vantomme, Andre; Hogg, S.; Pattyn, H.; Langouche, G.; Jin, S.; Bender, Hugo

Conference

Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits

Title

Formation and thermal stability of Nd0.32Y0.68Si1.7 layers formed by channeled ion beam synthesis

Publication type

Proceedings paper

Embargo date

9999-12-31