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Defect free trench isolation for high voltage bipolar application on SOI wafer
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Authors
Yindeepol, W.
;
Bashir, R.
;
McGregor, J. M.
;
Brown, K. C.
;
De Wolf, Ingrid
;
De Santis, J.
;
Ahmed, A.
Conference
Proceedings IEEE International SOI Conference
Title
Defect free trench isolation for high voltage bipolar application on SOI wafer
Publication type
Proceedings paper
Embargo date
9999-12-31
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