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Vertically stacked gate-all-around Si nanowire CMOS transistors with reduced nanowires separation, new work function metal gate solutions, and DC/AC performance optimization

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2185 since deposited on 2021-10-26
2last month
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Acq. date: 2026-02-24

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2185 since deposited on 2021-10-26
2last month
1last week
Acq. date: 2026-02-24

Citations