Authors

Schulze, Andreas; Han, Han; Strakos, Libor; Vystavel, Tomas; Porret, Clément; Loo, Roger; Caymax, Matty

Conference

SiGe, Ge, and Related Materials: Materials, Processing, and Devices 8

Title

Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling constrast imaging

Publication type

Proceedings paper

Embargo date

9999-12-31