Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling constrast imaging

dc.contributor.author	Schulze, Andreas
dc.contributor.author	Han, Han
dc.contributor.author	Strakos, Libor
dc.contributor.author	Vystavel, Tomas
dc.contributor.author	Porret, Clément
dc.contributor.author	Loo, Roger
dc.contributor.author	Caymax, Matty
dc.date.accessioned	2021-10-26T03:31:24Z
dc.date.available	2021-10-26T03:31:24Z
dc.date.issued	2018
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/31747
dc.source	IIOimport
dc.title	Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling constrast imaging
dc.type	Proceedings paper
dc.contributor.imecauthor	Han, Han
dc.contributor.imecauthor	Porret, Clément
dc.contributor.imecauthor	Loo, Roger
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.orcidimec	Han, Han::0000-0003-2169-8332
dc.contributor.orcidimec	Porret, Clément::0000-0002-4561-348X
dc.contributor.orcidimec	Loo, Roger::0000-0003-3513-6058
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	387
dc.source.endpage	396
dc.source.conference	SiGe, Ge, and Related Materials: Materials, Processing, and Devices 8
dc.source.conferencedate	30/09/2018
dc.source.conferencelocation	Cancun Mexico
dc.identifier.url	http://ecst.ecsdl.org/content/86/7/387.full.pdf+html
imec.availability	Published - open access
imec.internalnotes	ECS Transaction; Vol. 86, Issue 7