dc.contributor.author | Schulze, Andreas | |
dc.contributor.author | Han, Han | |
dc.contributor.author | Strakos, Libor | |
dc.contributor.author | Vystavel, Tomas | |
dc.contributor.author | Porret, Clément | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Caymax, Matty | |
dc.date.accessioned | 2021-10-26T03:31:24Z | |
dc.date.available | 2021-10-26T03:31:24Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31747 | |
dc.source | IIOimport | |
dc.title | Ascertaining the nature and distribution of extended crystalline defects in emerging semiconductor materials using electron channeling constrast imaging | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Han, Han | |
dc.contributor.imecauthor | Porret, Clément | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.orcidimec | Han, Han::0000-0003-2169-8332 | |
dc.contributor.orcidimec | Porret, Clément::0000-0002-4561-348X | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 387 | |
dc.source.endpage | 396 | |
dc.source.conference | SiGe, Ge, and Related Materials: Materials, Processing, and Devices 8 | |
dc.source.conferencedate | 30/09/2018 | |
dc.source.conferencelocation | Cancun Mexico | |
dc.identifier.url | http://ecst.ecsdl.org/content/86/7/387.full.pdf+html | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Transaction; Vol. 86, Issue 7 | |