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Antenna test structure matrix description, application for optimized HDP oxide deposition, metal etch, Ar preclean and passivation processing in sub-half micron CMOS processing
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1971 since deposited on 2021-10-06
2last month
Acq. date: 2025-12-10
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Views
1971 since deposited on 2021-10-06
2last month
Acq. date: 2025-12-10
Citations