dc.contributor.author | Subirats, Alexandre | |
dc.contributor.author | Arreghini, Antonio | |
dc.contributor.author | Delhougne, Romain | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Hikavyy, Andriy | |
dc.contributor.author | Breuil, Laurent | |
dc.contributor.author | Vadakupudhu Palayam, Senthil | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Linten, Dimitri | |
dc.contributor.author | Furnemont, Arnaud | |
dc.date.accessioned | 2021-10-26T04:57:24Z | |
dc.date.available | 2021-10-26T04:57:24Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31880 | |
dc.source | IIOimport | |
dc.title | Trap reduction and performances improvements study after high pressure anneal process on single crystal channel 3D NAND devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Arreghini, Antonio | |
dc.contributor.imecauthor | Delhougne, Romain | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Hikavyy, Andriy | |
dc.contributor.imecauthor | Breuil, Laurent | |
dc.contributor.imecauthor | Vadakupudhu Palayam, Senthil | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Linten, Dimitri | |
dc.contributor.imecauthor | Furnemont, Arnaud | |
dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
dc.contributor.orcidimec | Furnemont, Arnaud::0000-0002-6378-1030 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 600 | |
dc.source.endpage | 603 | |
dc.source.conference | IEEE International Electron Devices Meeting - IEDM | |
dc.source.conferencedate | 1/12/2018 | |
dc.source.conferencelocation | San Francisco, CA USA | |
dc.identifier.url | https://ieeexplore.ieee.org/document/8614667 | |
imec.availability | Published - open access | |