Authors

Subirats, Alexandre; Arreghini, Antonio; Delhougne, Romain; Rosseel, Erik; Hikavyy, Andriy; Breuil, Laurent; Vadakupudhu Palayam, Senthil; Van den Bosch, Geert; Linten, Dimitri; Furnemont, Arnaud

Conference

IEEE International Electron Devices Meeting - IEDM

Title

Trap reduction and performances improvements study after high pressure anneal process on single crystal channel 3D NAND devices

Publication type

Proceedings paper

Embargo date

9999-12-31