Publication:

Trap reduction and performances improvements study after high pressure anneal process on single crystal channel 3D NAND devices

Date

2018
Proceedings Paper
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Author(s)

Subirats, Alexandre
;
Arreghini, Antonio  
;
Delhougne, Romain  
;
Rosseel, Erik  
;
Hikavyy, Andriy  
;
Breuil, Laurent  
;
Vadakupudhu Palayam, Senthil  
;
Van den Bosch, Geert  
;
Linten, Dimitri  
;
Furnemont, Arnaud  

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