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Trap reduction and performances improvements study after high pressure anneal process on single crystal channel 3D NAND devices
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1 since deposited on 2021-10-26
Acq. date: 2026-01-06
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1983 since deposited on 2021-10-26
Acq. date: 2026-01-06
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Downloads
1 since deposited on 2021-10-26
Acq. date: 2026-01-06
Views
1983 since deposited on 2021-10-26
Acq. date: 2026-01-06
Citations