Coupled multiphysics circuital modelling of micro-opto-mechanical sensor systems

Publication:

2018

Proceedings Paper

Author(s)

Troia, Benedetto

;

Huang, Chih Hsien

;

Mao, Shengping

;

Gao, Hang

;

;

;

;

1977 since deposited on 2021-10-26

Acq. date: 2025-12-12