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Coupled multiphysics circuital modelling of micro-opto-mechanical sensor systems

dc.contributor.authorTroia, Benedetto
dc.contributor.authorHuang, Chih Hsien
dc.contributor.authorMao, Shengping
dc.contributor.authorGao, Hang
dc.contributor.authorFigeys, Bruno
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-26T05:57:53Z
dc.date.available2021-10-26T05:57:53Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31973
dc.sourceIIOimport
dc.titleCoupled multiphysics circuital modelling of micro-opto-mechanical sensor systems
dc.typeProceedings paper
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1054518
dc.source.conferenceMOEMS and Miniaturized Systems XVII
dc.source.conferencedate27/01/2018
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2290361
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 10545


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