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Reliability in stacked Gate-All-Around Si nanowire devices: time dependent variability and full degradation mapping
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Authors
Vaisman Chasin, Adrian
;
Bury, Erik
;
Franco, Jacopo
;
Kaczer, Ben
;
Rzepa, Gerhard
;
Putcha, Vamsi
;
Weckx, Pieter
;
Ritzenthaler, Romain
;
Mertens, Hans
;
Horiguchi, Naoto
;
Linten, Dimitri
Conference
Taiwan ESD and Reliability Conference (TESDC-2018)
Title
Reliability in stacked Gate-All-Around Si nanowire devices: time dependent variability and full degradation mapping
Publication type
Proceedings paper
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