Publication:
Damascene benchmark of Ru, Co and Cu in scaled dimensions
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2035 since deposited on 2021-10-26
34last month
5last week
Acq. date: 2026-10-13
Citations
Statistics
Views
2035 since deposited on 2021-10-26
34last month
5last week
Acq. date: 2026-10-13
Citations