Damascene benchmark of Ru, Co and Cu in scaled dimensions

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Authors
van der Veen, Marleen; Heylen, Nancy; Varela Pedreira, Olalla; Ciofi, Ivan; Decoster, Stefan; Vega Gonzalez, Victor; Jourdan, Nicolas; Struyf, Herbert; Croes, Kristof; Wilson, Chris; Tokei, Zsolt
Conference
IEEE International Interconnect Technology Conference - IITC
Title
Damascene benchmark of Ru, Co and Cu in scaled dimensions
Publication type
Proceedings paper
Embargo date
9999-12-31
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